
Microscope, Microscopy
BESTSCOPE: Inspection Microscope
- BESTSCOPE has various inspection tools that are used as Quality Inspection and Failure Analysis for semiconductor (solder bump, wafer, package device), PCB, LCD, mould, lead frame, etc.
- Typically designed with high magnification, illumination, long working distance and large sample stage. Most of the microscopes are integrated ready for bright field, dark field, polarizing and DIC functions to enhance image capture.
- Refer to Datasheet of various models below.
- BM Series Combination of high magnification, high transmittance, and sharp lenses with dark field, polarizing and DIC support. Large sample stage with coarse and fine movement. 3-axis measuring system with 0.1um precision. Multi-functional LED reflected illuminator, adjustable with colour temperature option.
- BS-6062 Designed with high power semi-apochromatic technology for long working distance and integrated observing functions such as bright field, dark field, polarizing and DIC.
- BS-4000A/B Infinite optical system with long working distance high-power objective lens and Filters (Blue, Green, Yellow and Frosted glass). Sample stage with large moving range of 250mm × 250mm. Optional Polarization Kit for different samples./li>
- NIS45 Infinite Colour Corrected Optical System with high NA and LWD objective and Kohler illumination that provides bright and uniform illumination throughout the viewing field. 3 layers mechanical sample stage of 356mm x 305mm with clutching handle. Optional Polarization and DIC kits for different samples.
- BS-4050NIR Uses a wide spectrum (900nm to 1700nm) infrared camera. With bandpass colour filter for area array detection, it can respond to different parts of the chip inside the silicon wafer. The optical elements in illuminators are in the 400-1700nm band and selectable between bright and infrared field. Automatic matching of aperture diaphragm and objective magnification. 5X to 50X infrared objectives provides aberration correction from visible to near infrared. For high magnification objectives with larger N.A., a correction ring is added to correct aberrations caused by difference in overlay thickness enabling high-definition and accurate detection in the near-infrared band. Multi-hole filter sliders; 1100nm, 1200nm, 1300nm bandpass near-infrared colour filters as option. By narrow-bandwidth secondary filtering, responses of different structures, high-definition images can be obtained. Software features measurement, image collection, and layer management with additional unique infrared image enhancement function and automatic detection functions.
- BS-4050RF Infinity Colour Corrected Optical System. Equipped with 8” wafer holder, three-layer mechanical stage size: 525mm x 330mm, moving range: 210mm x 210mm. Option: 6” wafer holder, stage size: 445mm x 240mm, moving range: 158mm x 158mm. Broad beam image system with maximum field of view of 26.5mm. Standard Trinocular head with two optional splitting ratios of 100:0 or 0:100, 100% image outputs from eyepieces or camera. Optional Trinocular head with three optional splitting ratios of 100:0 or 20:80 or 0:100, double-way image output of 20% from eyepieces and 80% from camera. Polarizer and 360° rotatable analyzer. Optional R/G/B Interference filters and DIC kit.
- BS-4060RF Infinity Colour Corrected Optical System. Equipped with 12” wafer holder, three-layer mechanical stage size: 420mm x 710mm, moving range: 305mm x 356mm. Ultra-Long Working Distance BD Semi-Apochromatic Metallurgical Objectives. Trinocular head with two optional splitting ratios of 100:0 or 0:100, 100% image outputs from eyepieces or camera. Polarizer and 360° rotatable analyzer. Optional R/G/B Interference filters and DIC kit.
- Inspection Microscope Full Catalog
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