Reference Wafer
NAPSON: RESISTIVITY REFERENCE WAFER
- NRW series Resistivity Reference Wafers use wafers with neutron irradiation, and has excellent stability.
- Napson’s four-probe resistivity measurement system is calibrated by standard wafers (NIST, VLSI) and conforms to the standards stipulated by the following Compliance Standards;
- SEMI Standards: SEMI-MF43-99, SEMI-MF374-02, SEMI-MF84-02, SEMI-MF1529-02
- Japan Industrial Standards: JIS-H-0602-1995
- Wafer Specifications:
- Material: Silicon
- Production Method: FZ
- Wafer finish frontside/backside: Lapped
- Doping: N-type (Phosphorous)
- Wafer size: Φ 100mm (4”)
- Resistivity Accuracy: 3%, φ5mm spot from sample center
Refer to Reference Wafer Selection Guide below
| MEASURE RANGE | ||||
|---|---|---|---|---|
| P/N | RESISTIVITY (Ω.cm) | THICKNESS (um) | CALCULATED SHEET RESISTANCE (Ω/sq) | WAFER ORIENTATION |
| NRW-6-16 | 16.00 ± 2.00 | 650.00 ± 25.00 | Approx. 250 | (1-1-1) ± 1° |
| NRW-7-42 | 41.50 ± 3.50 | 650.00 ± 25.00 | Approx. 650 | (1-1-1) ± 1° |
| NRW-8-52 | 52.00 ± 2.00 | 650.00 ± 25.00 | Approx. 800 | (1-0-0) ± 1° |
| NRW-2-110 | 110.00 ± 11.00 | 580.00 ± 10.00 | Approx. 2000 | (1-1-1) ± 1° |
| NRW-3-200 | 200.00 ± 12.00 | 675.00 ± 25.00 | Approx. 3000 | (1-1-1) ± 1° |
| NRW-4-330 | 330.00 ± 25.00 | 675.00 ± 25.00 | Approx. 5000 | (1-1-1) ± 1° |
| NRW-5-550 | 550.00 ± 50.00 | 450.00 ± 25.00 | Approx. 12000 | (1-1-1) ± 1° |
Datasheet Download:
Technical Notes Download:
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