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Resistance Measurement System, Resistance Meter, Resistivity Measurement System, Resistivity Meter

NAPSON: MANUAL RESISTIVITY/SHEET RESISTANCE MEASUREMENT SYSTEM

  • Single Point, Contact Type using 4-Point Measurement method. Sample size dependent on sample stage selected.
  • Single Point, Non-Contact Type using Eddy Current method. Measurement range dependent on probe type selected.
  • Applicable Materials:
    • Semiconductor and Solar-cell (Silicon, Polysilicon, SiC etc)
    • Functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
    • Conductive thin film (Metal, ITO etc)
    • Chemical Compound Semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
    • Silicon-related epitaxial materials, Ion-implantation sample
    • Diffused sample (or layer)
    • Silicon-related thin films (LTPS etc)
    • Others: On Request


Refer to Measurement System Selection Guide below

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RT-70V Series Contact Type Selection Guide
PARAMETER RT-70V/RG-7C RT-70V/RG-5 RT-70V/RG-7S RT-70V/TS-7D
RESISTIVITY (Ω.cm) 1u to 3M 1u to 3M 1u to 3M 1u to 3M
SHEET RESISTANCE (Ω/sq) 5m to 10M 5m to 10M 5m to 10M 5m to 10M
SAMPLE SIZE (mm) Ø 300 (Max) Ø 200 (Max) 500 x 500 (Max) 20 (Min)

Non-Contact Type Selection Guide
PARAMETER EC-80 EC-80P NC-10

LOW PROBE TYPE:

RESISTIVITY (Ω.cm)
SHEET RESISTANCE (Ω/sq)

 0.001 to 0.05
0.01 to 0.5		 0.001 to 0.05
0.01 to 0.5		 0.001 to 0.05
0.01 to 0.5

MIDDLE PROBE TYPE:

RESISTIVITY (Ω.cm)
SHEET RESISTANCE (Ω/sq)

 0.05 to 0.5
0.5 to 10.0		 0.05 to 0.5
0.5 to 10.0		 0.05 to 0.5
0.5 to 10.0

HIGH PROBE TYPE:

RESISTIVITY (Ω.cm)
SHEET RESISTANCE (Ω/sq)

 0.5 to 60.0
10.0 to 1k		 0.5 to 60.0
10.0 to 1k		 0.5 to 60.0
10.0 to 1k

S-HIGH PROBE TYPE:

RESISTIVITY (Ω.cm)
SHEET RESISTANCE (Ω/sq)

 60.0 to 200.0
1k to 3k		 60.0 to 200.0
1k to 3k		 60.0 to 200.0
1k to 3k

SOLAR WAFER PROBE TYPE:

RESISTIVITY (Ω.cm)
SHEET RESISTANCE (Ω/sq)

 NA 0.2 to 15.0
5.0 to 500.0		 NA

STANDARD SAMPLE SIZE

 Ø 8”
156mm x 156mm		 Ø 20mm (Min) with Flat Plane Ø 3” to 8”
156mm x 156mm

Datasheet Download:

Technical Notes Download:

Demo Video URL:

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