PN Checker, Resistance Measurement System, Resistance Meter, Resistivity Measurement System, Resistivity Meter, Wafer Flatness Measurement System
NAPSON: FULLY-AUTO SHEET RESISTANCE/RESISTIVITY MEASUREMENT SYSTEM
- Multiple Point, Contact Type using 4-Point Measurement method
- Multiple Point, Non-Contact Type using Eddy Current method. Measurement range dependent on probe type selected.
- Resistivity Range (Ω.cm): 0.001 to 200
- Sheet Resistance (Ω/Sq): 0.01 to 3k
- Thickness, Wafer Flatness and Conductivity (P/N) measurement available
- FOUP, GEM/SECS compatible
- Temperature correction for silicon wafers
- Sample Size: Ø 3” to Ø 12”
- RT-3000/RS-1300 for Flat Panel, up to 1,500mm x 1,850mm sample size
Datasheet Download:
- Fully Auto CT RG-2000AL/RG-3000AL
- Fully Auto CT RT-3000/RS-1300
- Fully Auto CT WS3000
- Fully Auto CT WS8800
- Fully Auto NCT NC2000FLA
- Fully Auto NCT NC6800FLA
- Fully Auto NCT NC600MAP
Technical Notes Download:
Demo Video URL:
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