4-Point Probe Head
NAPSON: 4-POINT PROBE HEAD FOR RESISTANCE/RESISTIVITY MEASUREMENT
- Napson offers four types of 4-point probe head with high precise resistivity/sheet resistance measurement for silicon wafers, epitaxial layers, diffusion layers, ITO layers, metal layers and other materials;
- Cartridge type
- Cylindrical type
- Miniature type
- Cartridge with 6-way connector socket type
- Load (needle pressure) is optimized using V type spring
- Tungsten carbide needles for durability
- Typical Specifications
- Needle Material: TC (Tungsten carbide) or OS (Osmium alloy)
- Radius: 40um (25 um to 500 um)
- Loads (g/needle) 200g (10g to 250g)
- Spacing: 1.00 mm (0.5 mm to 1.59 mm)
- Standard Arrangement: Linear (Square is available)
Refer to 4-Point Probe Head Selection Guide below
| SAMPLE TYPE | PROBE HEAD (MATERIAL-RADIUS) | LOAD/NEEDLE |
|---|---|---|
| Silicon Ingots / Block | TC-40u | 200g |
| Silicon Slice | TC-40u | 200g |
| Epitaxial Layers | TC-150u | 100g |
| Epitaxial Layers (Thin film) | TC-150u, 500u | 50g |
| Shallow Diffused -layers (Thin film) | OS-200u, 500u | 50g |
| Diffused Layers | OS-200u, TC-150u | 100g |
| Ion Implantation | TC-150u | 50g, 100g |
| Metal (Thin film) | TC-150u, 500u | 25g, 50g, 100g |
| ITO layer | TC-150u, 500u | 25g, 50g, 100g |
Datasheet Download:
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